M-Plane Aluminium Nitride (AlN) Substrates
- Non-polar substrate
- Close lattice and thermal match with GaN (reduced epilayer cracking)
- Mechanically and chemically stable
- Optically transparent
- US flats. Secondary flat identifies CMP face.
Specification
| Parameter Name | 15 mM |
| Thickness, mM | 0.4 ± 0.03 |
| FWHM, arcsec | <300 |
| Surface orientation (10-10), +/-deg | <0.5 |
| Al-face | epi-ready |
| Primary Flat Length, mM | 8 ± 2 |
| Primary Flat orientation, +/-deg | <0001> ± 5 |
| Secondary Flat Length, mM | 4 ± 2 |