Low Micropipe Silicon Carbide (SiC) Wafers
4H2IPB4D
- Production Grade B
- Polytype 4H-
- Diameter 2"
Specification
| Diameter, mm |
50.8 ± 0.38 |
| Thickness, mm |
(0.3 - 0.45) ± 0.03 |
| Dopant |
N-type Nitrogen |
| Micropipe density, cm-2 |
< 2 |
| Surface orientation, +/- deg |
4 ± 0.5, off-axis |
| Si-face treatment |
Epi-ready |
| Primary Flat Length, mm |
16 ± 2 |
| Primary Flat orientation, +/-deg |
<11 - 20> ± 5 |
| Secondary Flat Length, mm |
8 ± 2 |
| Secondary Flat orientation, +/-deg |
Si-face: 90 ± 5 cw from orientation flat |
| Resistivity, Ohm*cm |
≤ 0.03 |
| Packaging |
Single wafer package |