Epi-ready M-plane Aluminium Nitride (AlN) Substrates for UV LEDs, lasers, RF amplifiers, and SAW filters

M-plane Aluminium Nitride (AlN) Substrates

 
  • Non-polar substrate
  • Close lattice and thermal match with GaN (reduced epilayer cracking)
  • Mechanically and chemically stable
  • Optically transparent
  • US flats. Secondary flat identifies CMP face.

Specification

Parameter Name Value
Diameter, mm 15 ± 0.38
Thickness, mm 0.4 ± 0.03
FWHM, arcsec <300
Surface orientation (10-10), +/-deg <0.5
Al-face epi-ready
Primary Flat Length, mm 8 ± 2
Primary Flat orientation, +/-deg <0001> ± 5
Secondary Flat Length, mm 4 ± 2